Ethylene - Semiconductor Grade

C2H4

High purity ethylene is produced from lower purity material by a combination of purification techniques including molecular sieve and cryogenic fractional distillation. It is used to replenish carbon in the dielectric layers of the chip which may have been damaged during etch processes.

Standard Specifications

Purity / Assay
Impurities (Mol ppm)
4.5
99.995%
5.0
99.999%
5.5
99.9995%
Nitrogen< 5< 2< 1
Oxygen< 2< 2< 1
Carbon Dioxide< 5< 2< 1
Carbon Monoxide< 2< 2< 1
Other Hydrocarbons< 40< 8< 4
Acetylene< 4< 2< 1
Moisture**< 5< 3< 1
Total Impurities< 50< 10< 5

Please contact us if the specification you require is not shown above. AGT International is able to custom manufacture different specifications according to your requirements.

Standard Cylinder Sizes and Fill Volumes

Cylinder Information 
Cylinder SizeFill Volume (kg)
H5016.9
H4916.8

If you require a different container size please contact us.

Technical Information

Technical Data Shipping Information 
Molecular Weight (g/mol)28.054Shipping NameEthylene
Liquid Density (kg/m³)567.9Hazard Class2.1
Gas Density (kg/m³)1.178UN No.UN 1962
Boiling point (°C)-103.8Hazard LabelFlammable gas
Specific Volume (m³/kg)0.862CAS No.74-85-1
Vapour Pressure (bar.a @ 20°C)47.7
Valve OutletCGA 510 / BS 4 / DIN 1