Methane - Semiconductor Grade

CH4

High purity methane is produced from liquefied natural gas by a combination of purification techniques including molecular sieve and cryogenic fractional distillation. It is used to modulate the etch rate in the etch process step. Methane mixtures are also used to etch compound semiconductors. Ultra high purity methane is also used in the manufacture of artificial diamonds.

Standard Specifications

Purity / Assay
Impurities (Mol ppm)
5.0
99.999%
5.5
99.9995%
6.0
99.9999%
Nitrogen< 5< 1< 0.5
Oxygen< 2< 1< 0.5
Ethane< 5< 3< 0.5
Other Hydrocarbons< 2< 1< 0.5
Moisture**< 2< 1< 0.5
Total Impurities< 10< 5< 0.5

Please contact us if the specification you require is not shown above. AGT International is able to custom manufacture different specifications according to your requirements.

Standard Cylinder Sizes and Fill Volumes

Cylinder Information 
Cylinder SizeFill Volume (m3)
H5012.4
H4910.2

If you require a different container size please contact us.

Technical Information

Technical Data Shipping Information 
Molecular Weight (g/mol)16.043Shipping NameMethane, compressed
Liquid Density (kg/m³)422.6Hazard Class2.1
Gas Density (kg/m³)1.189UN No.UN 1971
Boiling point (°C)-161.6Hazard LabelFlammable gas
Specific Volume (m³/kg)1.48CAS No.630-08-0
Vapour Pressure (bar.a @ 20°C)N/A
Valve OutletCGA 350 / BS 4 / DIN 1